ISO/TR TECHNICAL REPORT 15969 Second edition 2021-03 Surface chemical analysis Depth profiling Measurement of sputtered depth Analyse chimique des surfaces - Profilage d'epaisseur - Mesurage de l'épaisseur bombardée Reference number ISO/TR 15969:2021(E) ISO @ISO2021 IS0/TR 15969:2021(E) COPYRIGHTPROTECTEDDOCUMENT IS0 2021 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting below or ISo's member body in the country of the requester. ISO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Email: [email protected] Website: www.iso.org Published in Switzerland ii @ IS0 2021 - All rights reserved

ISO TR 15969 2021 Surface chemical analysis — Depth profiling — Measurement of sputtered depth

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